⚡ 本页包含 AI 生成的分析内容，仅供参考
该论文提出了一种斩波电流反馈仪表放大器，通过AC耦合纹波降低环路实现了1mHz的1/f噪声拐点，解决了精密热敏电阻桥读出中的热膨胀补偿问题。
In the precision mechatronics of wafer steppers, thermal expansion is an important source of error. To compensate for this, the temperature of critical mechanical components must be measured with high resolution (<1µK), typically by using precision thermistor bridges. Furthermore, this resolution must be maintained over several minutes, which means that the amplifier used for bridge readout should have a 1/f noise corner of only a few mHz. Such noise performance is well beyond the capabilities of currently available CMOS amplifiers [1-3]. Although 1/f noise can be reduced by chopping or auto-zeroing, chopping is preferred for its superior low-frequency noise performance [4]. However, the up-modulated offset and 1/f noise causes significant ripple. This may be suppressed by a sample-and-hold filter [1,5], or by the use of auto-zeroing [4]. However, both techniques involve sampling, and therefore, incur a certain
Rong Wu, Kofi A.A. Makinwa, Johan H. Huijsing
Delft University of Technology, Delft, Netherlands