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ISSCC 2009Session 20 · SENSORS AND MEMSSensors

An Interface for a 300°/s Capacitive 2-Axis MicroGyroscope with Pseudo-CT Readout

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📋 论文概要

论文设计了一种用于300°/s电容式2轴微陀螺的接口电路,采用伪连续时间读出架构,以缩短启动时间并减少芯片面积,避免传统模式匹配所需的额外DSP和缓慢的环路建立。

💡 主要创新点

重要性
发表年份
ISSCC 2009

🏷 关键词

微陀螺接口电容式MEMS伪连续时间读出2轴陀螺低功耗

📄 原文摘要

The widespread use of capacitive MEMS vibratory gyroscopes is powerfully driven by low cost [1]; this is partly determined by factors such as die area and the number of necessary external components. Important properties of gyroscopes also include a short start-up time, and resolution that has been recently improved by applying the mode-matching technique [2,3]. However, the electromechanical feedback loop for active-mode matching requires additional DSP and chip area, and involves an additional slowly settling loop during the sensor startup. The pseudo-continuous-time (CT) secondary (sense) readout technique introduced in this paper is applied to the open-loop secondary readout of a gyroscope operating in the low-pass region. The technique alleviates the issues related to complexity and area as well as to the large time constants of the CT readout [4,5] without compromising noise performance or

👥 作者与机构

Lasse Aaltonen1, Timo Speeti1, Mikko Saukoski1,2, Kari Halonen1, 1

Helsinki University of Technology, Espoo, Finland ELMOS Semiconductor, Dortmund, Germany

分类:Sensors · 年份:ISSCC 2009