A Closed-Loop SC Interface for a ±1.4g Accelerometer with 0.33% Nonlinearity and 2µg/√Hz Input Noise Density

📋 论文概要

论文提出了一种用于±1.4g加速度计的闭环开关电容(SC)接口电路，通过电学阻尼有效抑制传感器元件的机械谐振，实现了高稳定性和低噪声性能。该设计解决了在高品质因数真空封装环境下传统ΔΣ闭环加速度计稳定性复杂的问题。

💡 主要创新点

• 采用闭环SC接口结构，对电容式加速度计进行电学阻尼，稳定高Q寄生谐振模式。
• 实现了极低的输入噪声密度（2µg/√Hz）和良好的线性度（0.33%非线性）。

🏷 关键词

📄 原文摘要

which allows the resonances of the element to be efficiently damped and permits, for example, an open-loop readout of the element. If the accelerometer is required to attain very low Brownian noise levels or packaged together with sensors such as a gyroscope, which necessitates the usage of vacuum packaging, the resonance modes with a high quality factor (Q) must be electrically damped. Electromechanical ΔΣ, a topology which is traditionally used for closed-loop accelerometers [1-3], becomes complex to stabilise in the presence of the highquality-factor and high-frequency parasitic resonance modes of the element [4]. An analogue approach is commonly ignored because of the potentially poor linearity. In this paper the proposed analogue closed-loop SC interface offers good

👥 作者与机构

Mikail Yucetas, Jarno Salomaa, Antti Kalanti, Lasse Aaltonen, Kari Halonen

Helsinki University of Technology, Espoo, Finland Capacitive MEMS accelerometers typically operate under atmospheric pressure,