⚡ 本页包含 AI 生成的分析内容，仅供参考
本文提出了一种低功耗三轴数字输出MEMS陀螺仪，采用单一驱动结构和多路复用角速率读出方案。通过集成AGC和PLL等电路，解决了多轴陀螺仪功耗和面积大的问题。
Chebyshev filter and amplified by a variable-gain amplifier (VGA). The VGA gain is automatically tuned by an outer automatic gain control (AGC) loop to regulate and verify the amplitude of the sustained oscillation at the CT-LP filter output to a constant set-point value. Finally, the VGA output, boosted by a charge-pump, is fed back to the combdrive actuating electrodes. All internal timings are generated by a PLL synchronized with the CT-LP filter output. 1 2 Motivated by the increasing demand of integrated inertial-sensing solutions for motion processing and dead-reckoning navigation in handheld devices and lowcost GPS navigators, this paper reports the details of a 3-axis silicon MEMS vibratory gyroscope that fulfills the pressing market requirements for low power
Luciano Prandi1, Carlo Caminada1, Luca Coronato1, Gabriele Cazzaniga1,
Fabio Biganzoli1, Riccardo Antonello2, Roberto Oboe2 STMicroelectronics, Cornaredo, Italy, University of Padova, Vicenza, Italy 2nd-order continuous-time (CT) low-pass (LP)