A 50mW CMOS Wind Sensor with ±4% Speed and ±2° Direction Error

📋 论文概要

本论文提出一种智能CMOS风传感器，通过两个热ΔΣ调制器控制并数字化芯片上的热分布，实现无移动部件的风速和风向测量。解决了传统机械风传感器可靠性低、成本高的问题，在1-25m/s范围内达到±4%的速度和±2°的方向精度。

💡 主要创新点

• 将二维热流传感器与读出电路完全集成在标准CMOS芯片上，无需移动部件。
• 利用两个热ΔΣ调制器同时量化芯片热分布，从而同时提取风速和风向信息。

🏷 关键词

📄 原文摘要

Tsinghua University, Beijing, China, Delft University of Technology, Delft, The Netherlands 2 This paper describes a smart CMOS wind sensor that measures wind speed and direction without moving parts. It combines a 2-D thermal flow sensor and the required readout circuitry on a standard CMOS chip. The flow-dependent heat distribution in the chip is controlled and digitized by two thermal delta-sigma (TΔΣ) modulators. Both wind speed and direction can then be determined from their bitstream outputs. For wind speeds ranging from 1 to 25m/s, the sensor’s error is less than ±4% (speed) and ±2° (direction), while consuming 9× less power than a previous design [1]. The wind sensor consists of a heated silicon chip glued to one side of a thin ceramic disc (Fig. 6.2.1). The wind is passed over the other side, and so the chip makes good thermal contact with the flow while still being protected from direct

👥 作者与机构

Jianfeng Wu1,2, Youngcheol Chae2, Caspar P.L. van Vroonhoven2, Kofi A.A. Makinwa2