⚡ 本页包含 AI 生成的分析内容，仅供参考
该论文提出了一种用于MEMS麦克风数字输出的50µW偏置反馈环路，实现了6ms的建立时间。通过低功耗电荷泵和二极管偏置，解决了麦克风偏置的稳定性和功耗问题。
compliant membrane and the rigid backplate is proportional to the air (acoustic) pressure. If the charge Q at the plates remains constant, there is a linear relationship between the voltage across the plates and the distance given by: ΔV=Q×Δd/εA. A practical charge source implementation (Fig. 11.3.1) is a DCDC converter (Vd) with a very high series resistance in the form of bipolar diodes (D1,2) [1]. A capacitor (Cg) provides the signal ground for the microphone (Cmems). An ADC performs continuous-time voltage readout of the microphone signal pin. Preferably its DC bias is equal to the ADC common-mode voltage. This paper deals with a biasing feedback loop (BFL) that realizes this function. In order to preserve the frequency response of the capacitive signal source, the resistive load must be in the GΩ range. When a clamp diode [1] or a pseudoPMOS resistor [2] is used without additional feedback, the microphone’s leakage current due to moisture (IL) of up to 1pA would cause the signal t
NXP Semiconductors, Nijmegen, The Netherlands, A MEMS microphone is a variable capacitor where the distance d between the