ASIC for a Resonant Wireless Pressure-Sensing System for Harsh Environments Achieving ±2% Error Between -40 and 150°C Using Q-Based Temperature Compensation

📋 论文概要

该论文提出了一种用于恶劣环境的谐振无线压力传感系统ASIC，通过消除传感器与IC之间的焊盘和焊线，将两者物理分离在两个腔室中，仅传感器腔室暴露于腐蚀性气体。该系统在-40至150°C温度范围内实现了±2%的误差，解决了传统凝胶保护在腐蚀性气体中可靠性有限的问题。

💡 主要创新点

• 消除传感器与ASIC之间的铝焊盘和焊线，避免腐蚀失效，提高系统在恶劣环境中的可靠性。
• 采用谐振无线压力传感方式，将传感器和ASIC物理隔离，仅传感器暴露于腐蚀性气体，延长电子部件寿命。
• 在宽温度范围内（-40至150°C）实现±2%的高精度压力测量，满足汽车尾气等应用需求。

🏷 关键词

📄 原文摘要

increasingly harsh environments such as acid containing gases in vehicle exhausts or exhaust gas recirculation. State-of-the-art gel protection for sensing elements and their electronics is reaching its limit. A circuit’s exposed aluminum bond pads are especially vulnerable to corrosion and failure. In response to these issues, we report an approach to eliminate bond pads and bonds between the sensor and IC altogether. Figure 11.4.1 shows the sensor and the ASIC, which are physically separated in two separate package chambers, of which only the sensor chamber is exposed to the corrosive gases. The sensing element is built exclusively out of materials that can withstand the harsh environments of an acid-containing medium. It consists of a 1mm2 capacitive MEMS pressure sensor surrounded by and connected to a 5-turn on-chip coil. The resonance frequency of the s

👥 作者与机构

Marko Rocznik1, Fabian Henrici2, Remigius Has2

Robert Bosch, Palo Alto, CA Robert Bosch, Stuttgart, Germany 1 2 Pressure sensors used in automotive applications are subject to