A Temperature-to-Digital Converter for a MEMSBased Programmable Oscillator with Better Than ±0.5ppm Frequency Stability

📋 论文概要

该论文提出了一种用于MEMS可编程振荡器的温度-数字转换器，实现了优于±0.5ppm的频率稳定性。通过集成温度补偿技术，解决了MEMS振荡器因温度变化导致的频率漂移问题。

💡 主要创新点

• 提出了一种高精度温度-数字转换器，用于实时补偿MEMS振荡器的温度依赖性频率漂移。
• 实现了优于±0.5ppm的总体频率稳定性，显著提升了MEMS振荡器作为晶体替代方案的性能。

🏷 关键词

📄 原文摘要

Shouvik Mukherjee2, Carl Arft2, Jin-Tae Kim2, Niveditha Arumugam2, Pavan Gupta2, Sassan Tabatabaei2, Sudhakar Pamarti4, Haechang Lee2, Fari Assaderaghi2 Masdar Institute of Science and Technology, Abu Dhabi, United Arab Emirates, SiTime, Sunnyvale, CA 3 Fairchild Semiconductor, San Jose, CA 4 University of California, Los Angeles, Los Angeles, CA 1 2 MEMS-based programmable oscillators have emerged as a promising alternative to crystal-based frequency references, with previously reported work demonstrating sub-ps integrated jitter [1]. Here we show frequency stability better than ±0.5ppm from -40 to 85°C, along with Allan Deviation (i.e., long term jitter) better than 0.005 ppm for 0.1, 1, and 10 second strides. Since the MEMS resonator has a well-defined temperature dependence, the key to this performance is a stable and low-noise temperature-to-digital converter (TDC) that utilizes a thermistor on the same die as the MEMS resonator.

👥 作者与机构

Michael Perrott1, Jim Salvia2, Fred Lee3, Aaron Partridge2,