A 1.55×0.85mm2 3ppm 1.0µA 32.768kHz MEMS-Based Oscillator

📋 论文概要

该论文提出了一款基于MEMS的32.768kHz振荡器，尺寸仅为1.55×0.85mm²，功耗低至1.0µA，频率稳定性达到3ppm，解决了传统石英谐振器在小型化、低功耗和高精度方面的挑战。

💡 主要创新点

• 采用MEMS谐振器替代传统石英晶体，实现了更小的封装尺寸和更低的功耗。
• 通过电路设计优化，在1.0µA超低功耗下实现了3ppm的高频率稳定性。
• 集成了温度补偿和频率校准技术，确保在宽温度范围内保持高精度。

🏷 关键词

📄 原文摘要

Rajkumar Palwai1, Niveditha Arumugam1, Preston Galle1, Meghan Phadke1, Charles Grosjean1, Jim Salvia1, Haechang Lee1, Sudhakar Pamarti3, Terri Fiez2, Kofi Makinwa4, Aaron Partridge1, Vinod Menon1 SiTime, Sunnyvale, CA, Oregon State University, Corvallis, OR, 3 University of California, Los Angeles, CA, 4 Delft University of Technology, Delft, The Netherlands 1 2 Mobile time-keeping applications require small form-factor, tight frequency stability, and micro-power 32.768kHz clock references. Today’s 32kHz quartz resonators and oscillators are facing challenges in size reduction [1,2]. Previously described MEMS-based oscillators can achieve tight accuracy but operate at high frequency with power unsuitable for mobile applications [3]. This paper introduces a 32kHz MEMS-based oscillator. Based on a comparison table of recent oscillators shown in Fig. 12.9.6, it offers the smallest size, 1.55×0.85mm2, with the best frequency stability, 100ppm (XO) and 3ppm

👥 作者与机构

Samira Zali Asl1,2, Shouvik Mukherjee1, Will Chen1, Kimo Joo1,