A 1.2μg/√Hz-Resolution 0.4μg-Bias-Instability MEMS Silicon Oscillating Accelerometer with CMOS Readout Circuit

📋 论文概要

本文提出了一种基于MEMS硅振荡加速度计与CMOS读出电路的设计，实现了1.2μg/√Hz的分辨率和0.4μg的偏置不稳定性。通过使用低功耗OTA和串联-并联反馈结构的减法器，有效降低了乘法噪声，并采用斩波技术消除闪烁噪声。

💡 主要创新点

• 提出一种基于串联-并联反馈的低功耗OTA减法器，使得有效跨导与gm无关，从而抑制乘法噪声。
• 在三个关键模块（包括减法器、振荡器驱动等）中采用斩波技术，有效消除剩余闪烁噪声。
• 实现了MEMS振荡加速度计与CMOS读出电路的单片集成，达到高分辨率和低偏置不稳定性。

🏷 关键词

📄 原文摘要

requires gm to be much larger than 1/Rs, which leads to large power overhead. The proposed subtractor in Fig. 27.2.2 utilizes a low-power OTA and a series-shunt feedback to boost the open loop gain, which makes the effective closed-loop trans-conductance R2/(R1∙Rs) and independent of gm. Thus, the multiplicative noise from MN12, MN13, MN14 and MN15 will not appear at the output. In this design, a chopper is employed in all the above three blocks to remove remaining additive flicker noise, as shown in Fig. 27.2.1. 1 2 Inertial navigation sets a very stringent requirement on the long-term stability of an accelerometer, which is characterized by bias instability. Long-term stability demands a very low-noise design. Accelerometers based on capacitance sensing

👥 作者与机构

Xi Wang1, Jian Zhao1,2, Yang Zhao1,2, Guo Ming Xia2, An Ping Qiu2,

Yan Su2, Yong Ping Xu1 National University of Singapore, Singapore, Singapore, Nanjing University of Science and Technology, Nanjing, China reduce gain dependence on gm, it