A 30ppm <80nJ Ring-Down-Based Readout Circuit for Resonant Sensors

📋 论文概要

该论文提出了一种基于振铃衰减的读出电路，用于谐振传感器，通过测量谐振频率和品质因数，实现了低功耗（<80nJ）和高精度（30ppm）的传感。解决了传统振荡器读出电路功耗高、受寄生电容影响大且只能提供频率信息的问题。

💡 主要创新点

• 提出振铃衰减读出方法，同时提取谐振频率和品质因数，提供更丰富的传感信息。
• 采用脉冲激励和零交叉检测技术，实现低功耗（<80nJ）和高精度（30ppm）的频率测量。
• 通过差分结构和数字校准，有效抑制寄生电容和工艺变化的影响。

🏷 关键词

📄 原文摘要

Resonant sensors are a promising candidates for energy-constrained applications. For instance, the resonance frequency shift of polymer-coated MEMS resonators has been used to realize electronic nose systems for personalized health and environmental sensing [1]. Oscillator-based readout circuits for such sensors have been successfully implemented [2,3], but are relatively power-hungry, difficult to design in the presence of parasitic capacitance, and only provide information about the resonance frequency, fres, while the quality factor, Q, often includes additional valuable information. As an alternative, measurement of the ring-down transient of a resonator can be used to determine both fres and Q. This approach is less sensitive to parasitics and potentially much more energy-efficient. However, prior integrated realizations of this technique require three or more ring-downs to obtain information about both fres and Q [4,5], while this information can, in principle,

👥 作者与机构

Hui Jiang, Zu-yao Chang, Michiel Pertijs

Delft University of Technology, Delft, The Netherlands