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本文提出了一种基于双MEMS谐振器的温度-数字转换器(TDC)，用于精密MEMS振荡器的温度补偿，解决了TDC噪声影响振荡器相位噪声的问题。该TDC实现了40μK的温度分辨率和0.12pJK²的品质因数。
Kamran Souri1, Rajkumar Palwai1, Will Chen1, Sudhakar Pamarti3, Joseph C. Doll1, Nicholas Miller1, Carl Arft1, Sassan Tabatabaei1, Carl Sechen2, Aaron Partridge1, Vinod Menon1 SiTime, Sunnyvale, CA, 2University of Texas, Dallas, TX, University of California, Los Angeles, CA 1 3 Precision MEMS oscillators require a temperature-to-digital converter (TDC) that adjusts the multiplication factor of a fractional-N PLL in order to compensate for the MEMS resonator’s frequency variation over temperature [1]. This compensation, however, provides a path for the TDC’s noise to propagate to the oscillator’s output as phase noise (PN). Previous work has sought to minimize this noise, by using high-resolution TDCs, e.g., the MEMS-thermistor based TDC described in [1]. This paper presents a TDC based on dual-MEMS resonators [2-3] that has no significant impact on oscillator PN. In a 130Hz bandwidth (BW), the sensor achieves a thermal-noise-limited resolution of 40μK, leading to
Meisam Heidarpour Roshan1,2, Samira Zaliasl1, Kimo Joo1,