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本文提出了一种基于电阻的CMOS温度传感器,通过优化读出电路实现了极低的功耗和1/f噪声抑制,达到了0.13 pJ·K²的优异分辨率FOM。该传感器适用于温度补偿频率参考等应用,解决了传统电阻传感器功耗高或噪声大的问题。
temperature compensation of frequency references [1-5]. High resolution and energy efficiency are then critical requirements, the former to minimize jitter and the latter to minimize power dissipation in a given conversion time. A MEMS-resonator-based sensor meets both criteria [1], but requires two resonators. In principle, resistor-based sensors also meet these criteria, and are CMOS compatible, but previous designs have been limited by the power dissipation [2-4] or 1/f noise [6] of their readout electronics. This paper describes a CMOS temperature sensor that digitizes the temperature-dependent phase shift of an RC filter. It achieves 410μKrms resolution in a 5ms conversion time, while consuming only 160μW. This corresponds to a
Sining Pan1, Yanquan Luo1,2, Saleh Heidary Shalmany1,3, Kofi A. A. Makinwa1
Delft University of Technology, Delft, The Netherlands Ulm University, Ulm, Germany 3 Broadcom, Bunnik, The Netherlands 1 2 Temperature sensors are often used for the