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本文提出了一种用于CT-ΔΣ MEMS陀螺仪的基于噪声观测的背景谐振频率调谐电路，通过实时观测噪声来匹配电气带通滤波器与传感器的驱动/检测谐振频率，实现了仅27μW的功耗和0.06mm2的面积，适用于低功耗闭环陀螺仪系统。
closed-loop configuration (CL) to satisfy the demand for high-performance and stable inertial sensors [1]. Due to the higher complexity and power consumption compared to open-loop solutions, these systems have usually been unsuitable for mobile battery-driven devices, e.g., for indoor navigation. Recently, the utilization of CT-ΔΣM for the readout of gyroscopes has shown to be a promising approach for reduced power consumption in a CL system [2]. In general, an accurate matching of the electrical BPF [2] to the drive and sense resonance frequencies of the sensor [3] is a prerequisite for maximizing SNR. For systems with drive frequencies fd of some tens of kHz and with a typical angular rate bandwidth of BW=50Hz, the frequency
Maximilian Marx1, Daniel De Dorigo1, Sebastian Nessler1,
Stefan Rombach2, Michael Maurer2, Yiannos Manoli1,2 University of Freiburg - IMTEK, Freiburg, Germany Hahn-Schickard, Villingen-Schwenningen, Germany 1 2 MEMS gyroscopes are used in