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该论文提出了一种采用标准CMOS工艺实现的1.8V真差分MEMS数字麦克风，能够处理高达140dB SPL的全量程声压，同时提供67dB的信噪比。解决了在低电源电压下兼顾高动态范围和信噪比的挑战，适用于手机和助听器等消费音频应用。
share in consumer applications such as mobile phones and hearing aids. The consumer market is demanding improved quality for audio recording, while also being capable of suppressing high-energy disturbers, e.g., wind noise. The challenge is to achieve both high DR and SNR at low supply voltages that limit signal swing. Signal levels are expressed in dB Sound-Pressure-Level (dB SPL) with respect to the human hearing threshold at a sound pressure of 20μPa corresponding to 0dB SPL. Today’s mass-market MEMS digital microphone solutions typically process sound up to 120dB SPL [1,2]. A conventional MEMS microphone transducer consists of a single rigid backplate and a compliant membrane moving with the sound pressure. The resulting change
Elmar Bach, Richard Gaggl, Luca Sant, Cesare Buffa, Snezana Stojanovic,
Dietmar Straeussnigg, Andreas Wiesbauer Infineon Technologies, Villach, Austria Over the last few years, robust MEMS microphones have gained significant market