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本文提出一种低噪声节能的桥式读出集成电路，通过稳定的桥偏置补偿方案抑制偏置漂移，实现了3.7nV/√Hz的输入噪声功率谱密度和44.1的功率效率因子，适用于精密传感应用。
Wheatstone bridge sensors are often used in precision instrumentation and measurement systems, e.g., for μK-resolution temperature sensing in wafer steppers [1] and mPa-resolution differential pressure sensing in precision air gauges [2]. Since they output small differential signals superimposed on a large common-mode (CM) voltage, typical bridge readout ICs (ROICs) consist of an instrumentation amplifier (IA) followed by an ADC [1]. This paper describes a low-noise energy-efficient ROIC, which achieves a 3.7nV/√Hz input-referred noise PSD and a power efficiency factor (PEF) of 44.1. The latter represents a 5× improvement on the state of the art [3]. As shown in Fig. 9.8.1, the ROIC consists of a capacitively coupled instrumentation amplifier (CCIA) followed by a continuous-time ΔΣ modulator (CTΔΣM). Compared to 3-opamp and current-feedback IAs, CCIAs only require a single amplifier, and are thus more energy-efficient [1,3]. Furthermore, due to
Hui Jiang, Kofi A. A. Makinwa, Stoyan Nihtianov
Delft University of Technology, Delft, The Netherlands