A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation

📋 论文概要

该论文提出了一种基于涡流原理的高分辨率位移传感器接口电路，采用126MHz高频激励和斩波稳定技术，实现了0.6nm的分辨率和19.8mW的低功耗。解决了高频下高精度测量与噪声抑制的难题。

💡 主要创新点

• 提出0.6nm分辨率的涡流位移传感器接口，采用126MHz高频激励实现高灵敏度。
• 采用斩波稳定技术并与激励时钟同步，有效抑制低频噪声和失调，避免频谱混叠。
• 设计两级Miller补偿OTA，并利用增益提升辅助放大器实现超过1GHz的GBW。

🏷 关键词

📄 原文摘要

Kofi A. A. Makinwa1, Stoyan Nihtianov1 Delft University of Technology, Delft, The Netherlands Catena Microelectronics, Delft, The Netherlands DC gain and >1GHz GBW (≈ 8*fmix) with a 1pF capacitive load. The OTA consists of a 2-stage Miller-compensated amplifier. To achieve sufficient gain at such high frequencies, auxiliary (gain-boosting) amplifiers of both PMOS and NMOS cascodes are also realized as 2-stage amplifiers. Together with the 1st stage, these are chopped to mitigate their offset and low-frequency noise. Chopping clock fchop is synchronized to fmix to obviate down-conversion of spectrum around higher harmonics of fmix. As shown in Fig. 9.9.7, the ECS interface occupies 1.18mm2 in TSMC 0.18μm CMOS technology. 1 2 Displacement sensing with sub-nanometer resolution is required in advanced metrology and high-tech industry, e.g., to measure the lens position in wafer scanners. Linear encoders and interferometers are often used for this purpose,

👥 作者与机构

Vikram Chaturvedi1, Mohammad Reza Nabavi2, Johan Vogel1,