Chopped Rate-to-Digital FM Gyroscope with 40ppm Scale Factor Accuracy and 1.2dph Bias

📋 论文概要

提出一种基于频率调制的MEMS陀螺仪，直接测量速率作为频率并与精密时钟参考比较实现数字输出，避免了传统位移测量方法中比例因子复杂且易受参数变化影响的问题。实现了40ppm的比例因子精度和1.2度/小时的偏置稳定性。

💡 主要创新点

• 采用直接频率测量替代间接位移测量，简化了比例因子并提高了精度
• 利用斩波技术降低低频漂移，提升偏置稳定性
• 通过比较陀螺仪频率与精密时钟参考实现高分辨率数字输出

🏷 关键词

📄 原文摘要

Present implementations of MEMS gyroscopes measure rate indirectly by first converting it to a displacement [1,2]. In this case, the scale factor is a complex function of the transducer and readout circuits. Changes of any of the underlying parameters result in measurement errors. The solution presented here measures rate directly as frequency and converts it to a digital output by comparing it to a precision clock reference [3]. Figure 10.1.1 illustrates the principle. The transducer proof mass consists of two orthogonal resonators excited at their resonant frequencies fo by two sustaining circuits. For a 90° phase shift in the displacements of the x- and y-channels, the motion of the proof mass follows a circular pattern. An observer in the rotating frame perceives a rate input as a shift of the observed oscillation frequency of the proof mass. The scale factor equals αz, where αz is the unit-less transducer gain. It can be

👥 作者与机构

Burak Eminoglu, Bernhard E. Boser

University of California, Berkeley, Berkeley, CA