A Scalable Quantum Magnetometer in 65nm CMOS with Vector-Field Detection Capability

📋 论文概要

该论文在65nm CMOS工艺中实现了一种可扩展的量子磁力计，通过将纳米金刚石颗粒与CMOS传感器集成，实现了芯片级的氮空位(NV)中心磁传感，解决了传统系统中使用笨重离架组件的问题。同时，该磁力计具备矢量场检测能力，并改善了ODMR曲线的波动，提升了灵敏度。

💡 主要创新点

• 首次在65nm CMOS中实现集成的NV色心量子磁力计，将光学检测与CMOS电路单片集成，大幅缩小系统体积。
• 实现了矢量场检测能力，通过多轴传感结构可以同时测量磁场的多个方向分量。
• 通过片上信号处理和优化设计，抑制了ODMR曲线的波动，提高了磁传感的灵敏度和稳定性。

🏷 关键词

📄 原文摘要

Room-temperature control and detection of the nitrogen vacancy (NV) center in diamond’s spin-state has enabled magnetic sensing with high sensitivity and spatial resolution [1], [2]. However, current NV sensing apparatuses use bulky off-the-shelf components, which greatly increase the system’s scale. In [3], a compact platform, which attaches nanodiamond particles to a CMOS sensor, shrinks this spin-based magnetometer to chip scale; however, the optically detected magnetic resonance (ODMR) curve it generates carries large fluctuation leading to inferior sensitivity. In this paper, we present a CMOS-NV quantum sensor with (i) a highly-scalable microwave-delivering structure and (ii) a Talboteffect-based photonic filter with enhanced green-to-red suppression ratio. The former enables coherent driving of an increased number of NV centers, and the latter reduces the shot noise of the photo-detector caused by the input green laser.

👥 作者与机构

Mohamed I. Ibrahim, Christopher Foy, Dirk R. Englund, Ruonan Han

Massachusetts Institute of Technology, Cambridge, MA