A 4.0×3.7×1.0mm3-MEMS CMOS Integrated E-Nose with

📋 论文概要

该论文提出了一款4.0×3.7×1.0mm³的MEMS-CMOS集成电子鼻芯片，集成了4个气体传感器、温度传感器和湿度传感器，实现了多气体低于ppm级的检测。解决了传统电子鼻体积大、难以集成的问题，适用于AI机器人和IoT健康应用。

💡 主要创新点

• 首次将4个气体传感器与温度、湿度传感器集成在单个MEMS-CMOS芯片上，尺寸仅为4.0×3.7×1.0mm³。
• 通过低功耗设计使芯片适用于IoT和健康领域的电池供电设备，同时保持ppm级气体检测能力。
• 利用MEMS和CMOS单片集成技术，实现了多传感模态的微型化电子鼻系统。

🏷 关键词

📄 原文摘要

Si Hoon Lee1, Kwangmin Park1, Jaeheung Lim1, Minchul Lee1, Jeongho Park1, Hyun Kim1, Young Ok Lee2, Hyun Su Ahn2, Eunseok Shin1, Hyungjong Ko1, Seoungjae Yoo1, Hyunsurk Ryu1, Yongin Park1, Joonseok Kim1, Long Yan1 Samsung Electronics, Hwaseong, Korea Wisol, Osan, Korea 1 2 An Electronic Nose (E-Nose), capable of recognizing various odors and flavors, will add essential functions to AI robots [1], which traditional physical sensors such as cameras cannot provide. To date, a miniaturized E-Nose, as a chemical sensor, that is capable of sensing multiple gases below ppm-level, still remains a challenge. As a miniaturized but highly sensitive gas sensor platform, chemically coated resonators such as beam resonator [2], Surface Acoustic Wave (SAW)

👥 作者与机构

Embedded 4×Gas Sensors, a Temperature Sensor and, a Relative Humidity Sensor