A Highly Digital 2210µm2 Resistor-Based Temperature Sensor with a 1-Point Trimmed Inaccuracy of ±1.3°C (3σ) from -55°C to 125°C in 65nm CMOS

📋 论文概要

该论文提出了一种高度数字化的电阻式温度传感器，面积仅2210µm²，通过1点修调在-55°C至125°C范围内实现±1.3°C（3σ）的精度，解决了微处理器和SoC中局部热点监测对小型化、中等精度和高速温度传感器的需求。

💡 主要创新点

• 采用电阻式传感与数字读出架构，实现极小的芯片面积（2210µm²），适合密集布局中的局部温度监测。
• 通过1点修调技术，在宽温度范围内达到±1.3°C（3σ）的高精度，无需复杂校准。
• 结合高速采样（约1kS/s）和低功耗（数十µW），满足系统热管理对快速响应和低能耗的要求。

🏷 关键词

📄 原文摘要

Yonsei University, Seoul, Korea 1 2 Microprocessors and SoCs employ multiple temperature sensors to prevent overheating and ensure reliable operation. Such sensors should be small (<10,000µm)) to monitor local hot-spots in dense layouts. They should also be moderately accurate (~1°C) up to high temperatures (&125°C), so that the system throttling temperature can be set as close as possible to the maximum allowable die temperature. Furthermore, they should be fast (~1kS/s) and consume low power (tens of µW). Compact resistor-based temperature sensors can meet most of these requirements. As shown in Fig. 5.3.1 (left), they often consist of a frequency-locked loop (FLL), which maintains a constant phase shift (ϕref) in an RC filter by adjusting its drive frequency (Fdrive) in a temperature-dependent manner [1,2]. Mainly due to their use of analog loop filters, however, they typically occupy more than 5,000µm), and are difficult to scale.

👥 作者与机构

Jan A. Angevare1, Youngcheol Chae2, Kofi A. A. Makinwa1

Delft University of Technology, Delft, The Netherlands