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提出一种MEMS Coriolis质量流量传感器，用于测量极小流量（<1克/小时）的液体和气体，解决了传统MEMS热流量传感器只能测体积流量、需针对不同流体校准的问题。该传感器实现了300µg/h/√Hz的分辨率和±0.8mg/h的零稳定性。
in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1,3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids [1] or gases [2,3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature [4]
Arthur C. de Oliveira1, Jarno Groenesteijn2, Remco J. Wiegerink3, Kofi A. A. Makinwa1
Delft University of Technology, Delft, The Netherlands Bronkhorst BV, Ruurlo, The Netherlands 3 University of Twente, Enschede, The Netherlands 1 2 Precision flow sensors are widely used