A Closed-Loop 12bit CMOS-Integrated Stress Sensor System with 4bit Adjustable Sensitivity from 178 to 11kPa/LSB at up to 22.5kS/s and 5bit Dynamic Range Adjustment.

📋 论文概要

该论文提出了一种闭环12位CMOS集成应力传感器系统，具有4位可调灵敏度，覆盖从178到11kPa/LSB的宽范围，以满足物联网、机器人和预测性维护等不同应用对灵敏度和采样率的需求。通过闭环架构和可调设计，解决了传统应力传感器在适应多种应用场景时的灵活性不足问题。

💡 主要创新点

• 提出闭环架构的CMOS集成应力传感器，实现高精度和稳定性。
• 创新性地采用4位数字可调灵敏度，覆盖从178到11kPa/LSB的宽动态范围，适应不同应用场景。

🏷 关键词

📄 原文摘要

University of Freiburg - IMTEK, Freiburg, Germany 1 2 The increasing popularity of integrated stress sensors due to emerging fields such as Internet-of-Things (IoT), robotics and predictive maintenance led to various implementations to exploit the piezoresistive property of silicon [1-4]. Required specifications differ severely depending on the intended field of application. Tactile applications are in need of high sampling rates to reduce latency, e.g. for slip detection, whereas for predictive maintenance applications sensitivity requirements might dominate. To cover a wide range of applications, hence specifications, this paper presents a complete sensor system with 32 integrated MOS stress sensors including 4bit programmable sensitivity and 5bit analog dynamic range adjustment at 12bit resolution (Fig. 23.4.1). A fundamental sensor element assembles four MOS devices split in two pairs TS1/TS2

👥 作者与机构

Kim Allinger1, Matthias Kuhl2

Hamburg University of Technology, Hamburg, Germany