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ISSCC 2025Session 28 · CAPACITIVE SENSOR READOUTSensors

A 185.2dB-FoMs 8.7aFrms Zoomed Capacitance-to-Digital Converter with Chopping-Based kT/C Noise Cancellation and Add-Then-Subtract Phase-Domain Lead-Compensation Technique

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📋 论文概要

该论文提出了一种基于斩波kT/C噪声消除和Add-Then技术的缩放式电容-数字转换器(CDC),实现了185.2dB FoMs和8.7aFrms的高分辨率。该设计结合了SAR和ΔΣM的优势,有效解决了高能效与低延迟的矛盾,适用于高性能MEMS传感器等实时应用。

💡 主要创新点

核心指标
185.2dB FoMs, 8.7aFrms
重要性
发表年份
ISSCC 2025

🏷 关键词

电容-数字转换器缩放架构kT/C噪声消除斩波技术高能效

📄 原文摘要

traditional lowspeed fields, such as measuring pressure [1] and humidity [2], to real-time applications like robotics and drones. E.g., high-performance MEMS motion-tracking devices feature a short measurement time of 31.25µs [3]. These developments necessitate capacitance-todigital converters (CDCs) with high resolution, good energy efficiency, and low latency. The zoom architecture, combining the merits of energy-efficient SAR with high-resolution ∆ΣM, draws rising attention [4-6]. Owing to the scaling friendliness and high efficiency, the VCObased time-domain (TD) ∆ΣM has been explored lately for the fine stage [7-9]. The VCO stage features intrinsic phase integration, thus obviating the need for power-hungry OTAs. The digitized phase output allows low-cost multi-bit quantization, largely reducing the

👥 作者与机构

Bingrui Li, Zilong Shen, Haoyang Luo, Jiachang Yang, Zongnan Wang,

Yuan Wang, Xiyuan Tang Peking University, Beijing, China Recent advancements have broadened the use of capacitive sensors from

分类:Sensors · 年份:ISSCC 2025