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本文提出了一种用于高分辨率浮空目标位移检测的电容数字转换器，通过低通RC前端将传感电容转换为相移，并利用高分辨率相位域Delta-Sigma调制器进行数字化，实现了143dB动态范围和119dB共模抑制比。该设计有效抑制了电场干扰，解决了浮空目标在高频下的干扰问题。
systems [1-4]. Compared to eddy-current displacement sensors [1], capacitive displacement sensors are potentially more energy efficient [2-4]. However, they are more susceptible to electric-field interferences on an electrically floating target, especially at high frequencies. This paper presents a capacitive displacement sensor, in which sensing capacitance is converted to phase shift via a lowpass RC front-end and then digitized by a high-resolution PhaseDomain-Delta-Sigma modulator (PD∆ΣM). With inherent high/low-pass noise filtering provided by the front-end/readout circuits, both low-frequency and high-frequency interferences are rejected, which can be reflected from the sensor’s CMRR of 119dB near DC and 97dB around 100MHz. Also, the prototype sensor achieves a >143dB (35.2aF-to500pF) dynamic range (DR) without sub-ranging and less tha
Sining Pan1, Xiaolong Zhang1, Baoyi Zheng1, Yihang Cheng1, Hui Jiang2, Huaqiang Wu1
Tsinghua University, Beijing, China CoSensing, Utrecht, The Netherlands 1 2 Displacement sensors are widely used in high-precision nanomechatronic