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本文提出了一种完全数字化的片上电路，用于测量紧密相邻器件的阈值电压局部随机变化，解决了传统通过I-V曲线测量需要模拟焊盘和多路复用的低效问题。该电路实现了对局部变化的快速、精确表征，有助于工艺优化和低电压电路设计。
Accurate characterization and measurement of local variation in threshold voltage (Vt) of closely spaced devices is essential for process optimization, yield enhancement and design of analog circuits in current technologies. Threshold variation is a particularly acute problem for low-supply-voltage and subthreshold logic circuits. Historically, characterization is achieved through determination of current-voltage (I-V) curves of similar adjacent devices, each connected to measurement pads. Recently, multiplexing multiple devices to pads has greatly increased the number of devices that can be measured, but requires significant data analysis, in addition to accurate current measurement [1-7]. More recently, an on-chip test scheme that measures mismatch between pairs of devices using the application of an analog voltage difference to a latch-type sense amplifier circuit coupled with digital output sensing has been proposed [8]. This paper presents a completely onchip digital circuit to me
Rahul Rao, Keith A. Jenkins, Jae-Joon Kim
IBM T. J. Watson, Yorktown Heights, NY