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本文提出了一款1/2.3英寸10.3百万像素背照式CMOS图像传感器,支持50帧/秒的帧率,面向数码相机和高清摄像机应用。它通过背照式技术解决了传统前照式传感器灵敏度低、饱和信号小的问题,实现了高像素、高灵敏度、高饱和信号和低噪声。
Souichiro Kuramochi1, Oichi Kumagai1, Seijiro Sakane1, Masamichi Ito1, Masahiro Hatano1, Masaru Kikuchi1, Yuuki Yamagata1, Takeshi Shikanai1, Ken Koseki1, Keiji Mabuchi1, Yasushi Maruyama1, Kentaro Akiyama1, Eiji Miyata2, Tomoyuki Honda2, Masanori Ohashi2, Tetsuo Nomoto1 1 Sony, Atsugi, Japan Sony Semiconductor, Nagasaki, Japan 2 This paper presents a 1/2.3-inch 10.3Mpixel Back-Illuminated (BI) CMOS image sensor that targets both digital still camera (DSC) and high-definition camcorder applications. These applications require high-pixel-count, high-sensitivity, high saturation signal, low noise and high-speed imaging for image quality [1]. The sensor is scaled down to get a higher resolution due to higher pixel count. Several approaches such as a Cu process to reduce the pixel height and inner micro-lenses to gather rays of incident light have been proposed to overcome electro-optical challenges [2-4]. The BI process has been reported as one of the
Hayato Wakabayashi1, Keiji Yamaguchi1, Masafumi Okano1,