Accurate Characterization of Random Process Variations Using a Robust Low-Voltage HighSensitivity Sensor Featuring Replica-Bias Circuit

📋 论文概要

该论文提出了一种鲁棒的低电压高灵敏度传感器，用于准确表征随机工艺变化（如阈值电压波动），解决了传统方法需要大量数据分析或只能测量两个器件失配的局限性。该传感器基于数字阵列结构，能够提供更丰富的统计信息，适用于SRAM、灵敏放大器等关键晶体管的匹配优化。

💡 主要创新点

• 提出一种鲁棒的低电压高灵敏度传感器，能够在低电压下准确测量随机阈值电压波动。
• 采用数字阵列结构，克服了传统方法只能测量两个器件失配的局限，提供更多统计数据。
• 通过简化测量流程和数据分析，提高了工艺变化表征的效率和准确性。

🏷 关键词

📄 原文摘要

random threshold voltage (Vth) fluctuations is crucial in process optimization and yield learning, particularly for matching critical transistors such as SRAMs, sense amplifiers, differential amplifiers, etc. Traditional methods in which multiplexed devices under test (DUTs) are characterized using accurate current measurements require extensive data analysis [1-3]. A sense-amplifier based measurement method presented in [4] provides limited statistical data since it can measure the mismatch between only two devices. Recently, a digital array based technique is proposed in [5] with limited sensitivity. Finally, a sub-threshold technique presented in [6] provides high sensitivity but lacks on-chip calibration. This paper presents a low voltage, high sensitivity random process variations sensor utilizing an on-chip calibration circuit for improved accuracy. Moreover, the pro

👥 作者与机构

Mesut Meterelliyoz1, Ashish Goel2, Jaydeep P. Kulkarni1, Kaushik Roy2, 1

Intel, Hillsboro, OR Purdue University, West Lafayette, IN 2 Accurate and fast measurement and characterization of