Microwave Amplification with Nanomechanical Resonators

📋 论文概要

该论文研究了利用纳米机械谐振器实现微波放大，通过聚焦离子束切割制造铝梁谐振器，间隙小至10nm，旨在替代石英器件并集成到IC技术中。

💡 主要创新点

• 采用聚焦离子束（FIB）切割技术制造铝梁谐振器，实现10nm间隙，有望通过氦离子束进一步改进。
• 将纳米机电系统（NEMS）应用于微波放大，为集成振荡器提供新方案。

🏷 关键词

📄 原文摘要

beam resonators. One such mechanical device is illustrated in Fig. 11.4.7. The fabrication relies on e-beam patterning, gas phase HF-etching, and release of the Al-beam using focused ion beam (FIB) cutting, as described in [4]. The FIB cutting using Gabeam has facilitated gaps down to 10nm, up to now. Improvement could be expected using He-ion beam. 1 2 There is strong interest at present in nanoelectromechanical systems (NEMS) in IC technology. On one hand, the interest arises from the need to have integrated oscillators to replace quartz devices and, on the other hand, from the wish to have tunable filters for cognitive radios in mobile communications. In addition, there are lots of opportunities in quantum information processing, where coherence properties are crucial, and where mechanical systems at low

👥 作者与机构

Francesco Massel1, Tero T Heikkilä1, Juha-Matti Pirkkalainen1,

Sung-Un Cho1, Heini Saloniemi2, Pertti J Hakonen1, Mika A Sillanpää1 Aalto University, Espoo, Finland, VTT, Espoo, Finland So far we have demonstrated the operation using aluminium