image sensors able to gather information about photon position, number and time distribution, enabling cost-effective devices for scientific imaging applications like fluorescence lifetime imaging microscopy (FLIM), Raman spectroscopy, time-resolved near-infrared spectroscopy, but also consumer applications like 3D imaging. Despite the digital behavior of SPADs, pixels using signal processing in the digital domain suffer from very low fill-factor (FF), on the order of 1% [1]. Alternatively, analog counting enables compact electronics with 20.8% FF and down to 1.1ns time gating capability in 2D arrays [2] or 530ps in test structures [3]. Smaller technology nodes allow up to 26.8% FF, but high non-uniformity reduces the dynamic range and makes extensive external
Matteo Perenzoni, Nicola Massari, Daniele Perenzoni,
Leonardo Gasparini, David Stoppa Fondazione Bruno Kessler, Povo, Italy CMOS Single-Photon Avalanche Diodes (SPADs) offer the possibility to realize