A Double-Side CMOS-CNT Biosensor Array with Padless Structure for Simple Bare-Die Measurements in a Medical Environment

📋 论文概要

该论文提出了一种双面CMOS-CNT生物传感器阵列，采用无焊盘结构，便于在医疗环境中进行裸片测量。解决了传统CMOS-CNT传感器中键合焊盘间电短路问题，简化了CNT涂层工艺。

💡 主要创新点

• 提出双面CMOS-CNT生物传感器阵列，将传感器和电路分布在芯片两侧，避免焊盘干扰。
• 采用无焊盘结构，实现简单裸片测量，无需复杂封装，适合医疗环境。

🏷 关键词

📄 原文摘要

Korea 1 2 CMOS sensors using nanomaterials on the surface are very effective for early detection of diseases. Among the nanomaterials, carbon nanotube (CNT) is an ideal biosensor material since it has a small diameter (~1nm) directly comparable to the size of biomolecules and excellent electrical characteristics. Because CNT is formed chemically in a special environment, to use it in a CMOS process, many electrodes are formed as an array and the CNT solution is coated on the electrode array. However, to prevent electrical shorts between bonding pads, very complicated area-selective CNT coating processes are required. Furthermore, chip packaging steps—such as wire bonding, chip passivation against reactions to the wire, microfluidic channels on the chip, etc.—should be

👥 作者与机构

Jinhong Ahn1, Jeaheung Lim1, Seok-Hyang Kim1, Jun-Yeon Yun1,

Changhyun Kim1, Sang-Hoon Hong2, Myoung-Jin Lee3, Youngjune Park1 Seoul National University, Seoul, Korea, Kyung Hee University, Yongin, Korea, 3 Chonnam National University, Gwangju,