CMOS Monolithic Airborne-Particulate-Matter Detector Based on 32 Capacitive Sensors with a Resolution of 65zF rms

📋 论文概要

该论文提出了一种基于CMOS单片集成的空气颗粒物检测器，利用32个电容传感器实现粒径低至1μm的颗粒计数。解决了传统光学和重力检测方法便携性差、成本高的问题，为便携式网络化颗粒物监测提供了新方案。

💡 主要创新点

• 首次实现CMOS单片集成的空气颗粒物电容检测器，集成32个传感器。
• 采用互指电极结构直接感应沉积颗粒，达到65zF rms的电容分辨率。

🏷 关键词

📄 原文摘要

matter (PM) is well known [1]. Although optical and gravimetric instruments are available to detect PM, they lack portability, have poor potential for miniaturization, and are not low cost. Instead, a better spatio-temporal resolution in PM monitoring by means of portable networked sensors would allow significant enhancements in terms of modeling and prediction capabilities and elucidation of subtle toxicological pathways [2]. Here, we introduce a CMOS monolithic airborne PM detector able to count particles with a size down to 1μm. The chip senses the dust deposited directly above interdigitated coplanar electrodes by a capacitive measurement, and it extends the proof-of-concept of the technique reported in [3] by integrating electrodes and electronics on the same standard CMOS chip, thus improving the

👥 作者与机构

Pietro Ciccarella, Marco Carminati, Marco Sampietro, Giorgio Ferrari

Politecnico di Milano, Milano, Italy The adverse impact on human health of the exposure to airborne particulate