⚡ 本页包含 AI 生成的分析内容，仅供参考
该论文提出了一种30-80MHz同时双模式外差振荡器，面向NEMS阵列重力传感应用。通过同时跟踪多个NEMS谐振器的频率偏移，解决了大规模并行传感读出电路的限制问题。
scale physical variations has led to the breakthrough development of NEMS-based mass spectrometry systems capable of measuring a single molecule [1]. Parallel sensing using thousands of devices will help to circumvent the small effective sensing area while opening new perspectives for applications that require spatial mapping. While the development of NEMS CMOS co-integration technology [2] is of paramount importance to achieve high density sensor arrays (>1000 devices), the readout circuitry capable of tracking NEMS resonator frequency shifts is still the limiting factor for the very large scale integration of individually addressed sensors. Moreover, in order to resolve the mass and position of an adsorbed analyte, single particle mass sensing applications require to track
Guillaume Gourlat, Marc Sansa, Patrick Villard, Gilles Sicard,
Guillaume Jourdan, Issam Ouerghi, Gérard Billiot, Sébastien Hentz CEA-LETI-MINATEC, Grenoble, France The extreme sensitivity of nano electro mechanical system (NEMS) to atomic