Fully Integrated Optical Spectrometer with 500-to-830nm Range in 65nm CMOS

📋 论文概要

该论文提出了一种在65nm CMOS工艺中完全集成的光学光谱仪，覆盖500至830nm波长范围，解决了传统光谱仪体积大、成本高、功耗高的问题，适用于物联网智能传感应用。

💡 主要创新点

• 首次在65nm CMOS中实现完全集成的光学光谱仪，无需外部光学组件。
• 采用片上衍射光栅和光电探测器阵列，实现宽光谱范围（500-830nm）的检测。
• 通过电路设计优化，在紧凑尺寸下实现低功耗和高分辨率光谱分析。

🏷 关键词

📄 原文摘要

Next-generation IoT systems are expected to be enabled by compact, low-cost, low-power, smart sensing devices that provide a wealth of information to build new applications and capabilities. Among sensing modalities, optical spectrometry is one of the rapidly growing areas of interest due to its wide range of applications from environment monitoring, industrial and home applications to healthcare [13]. As shown in Fig. 27.8.1, current optical spectrometers are large and bulky with non-integrated components that limit their application potential. In this paper, we present a fully integrated CMOS-based optical spectrometer in a 65nm bulk process that requires no external optical components. The spectrometer achieves nearly 10nm resolution and 1.4nm accuracy in peak prediction of continuouswave (CW) excitations between 500 and 830nm. The principle of operation of a classical optical spectrometer relies on light incident

👥 作者与机构

Lingyu Hong, Kaushik Sengupta

Princeton University, Princeton, NJ