⚡ 本页包含 AI 生成的分析内容，仅供参考
该论文提出了一种8位亚阈值混合热传感器，采用单元件远程传感技术，在22nm FinFET工艺中实现了±1.07°C的测量不准确度。它解决了传统NPN基传感器在双阱工艺中受限的问题，实现了低功耗、小面积的多传感器部署。
(SoC) to provide information about die temperature for thermal protection or performance optimization. To enable the deployment of multiple sensors in an SoC, the power and size of such sensors has been steadily reduced. Although most solutions are PNP-based [1-4], recently a low-power NPN-based currentmode thermal sensor [5] was implemented to meet the power and form-factor requirement with a robust architecture. However, since NPN devices are only available in a triple-well process, its use in low-cost dual-well processes is limited. This paper demonstrates a current-mode hybrid thermal sensor in an advanced 22nm FinFET process [6] based on subthreshold NMOS transistors and a parasitic PNP [7]. A simple voltage-based single-point soft-trimming was implemented to mitigate the sensitivity of the sensor to the subthreshold factor variability during
Cho-Ying Lu1, Surej Ravikumar1, Amruta D. Sali1, Matthias Eberlein2, Hyung-Jin Lee1
Intel, Hillsboro, OR, 2Intel, Neubiberg, Germany 1 Thermal sensors are commonly used in modern highly dense systems-on-chip