A Phase-Domain Readout Circuit for a CMOSCompatible Thermal-Conductivity-Based Carbon Dioxide Sensor

📋 论文概要

本文提出了一种用于CMOS兼容热导率二氧化碳传感器的相位域读出电路，解决了传统NDIR传感器尺寸大、成本高且与CMOS工艺不兼容的问题。该电路通过测量热导率引起的相位变化来检测CO2浓度，适用于楼宇自动化中精确控制通风的应用。

💡 主要创新点

• 提出相位域读出方法替代传统幅度检测，提高了对热导率变化的灵敏度和抗干扰能力。
• 实现了CMOS兼容的传感器与读出电路集成，降低了成本和尺寸，适合大规模生产。

🏷 关键词

📄 原文摘要

Kofi A. A. Makinwa1, Michiel Pertijs1 Delft University of Technology, Delft, The Netherlands NXP Semiconductors, Eindhoven, The Netherlands 3 ams AG, Eindhoven, The Netherlands 1 2 The measurement of carbon-dioxide (CO2) concentration is very important in home and building automation, e.g. to control ventilation in energy-efficient buildings. This application requires compact, low-cost sensors that can measure CO2 concentration with a resolution of <200 ppm over a 2500ppm range. Conventional optical (NDIR-based) CO2 sensors require components that are CMOS-incompatible, difficult to miniaturize and power-hungry [1]. Due to their CMOS compatibility, thermal-conductivity-based sensors are an attractive alternative [2,3]. They exploit the fact that the thermal conductivity (TC) of CO2 is lower than that of the other constituents of air, so that CO2 concentration can be indirectly measured via the heat loss of a hot wire to ambient. However, this

👥 作者与机构

Zeyu Cai1,2, Robert van Veldhoven2, Hilco Suy3, Ger de Graaf1,