A 256×256 45/65nm 3D-Stacked SPAD-Based Direct TOF Image Sensor for LiDAR Applications with Optical Polar Modulation for up to 18.6dB Interference Suppression

📋 论文概要

该论文提出了一种基于单光子雪崩二极管（SPAD）的256×256分辨率直接飞行时间（DTOF）图像传感器，采用45/65nm 3D堆叠工艺，用于激光雷达（LiDAR）应用。通过光学偏振调制技术，解决了远距离、高背景光干扰下的精度和速度问题。

💡 主要创新点

• 采用3D堆叠技术将SPAD阵列与读出电路集成，实现高分辨率（256×256）直接TOF成像。
• 引入光学偏振调制方法，增强对背景光的抑制能力，提升LiDAR在强环境光下的鲁棒性。

🏷 关键词

📄 原文摘要

Yuichiro Yamashita3, D. N. Yaung3, Edoardo Charbon1,2 Delft University of Technology, Delft, The Netherlands EPFL, Neuchatel, Switzerland; 3TSMC, Hsinchu, Taiwan 1 2 Light detection and ranging (LiDAR) systems based on direct time-of-flight (DTOF) are used in spacecraft navigation, assembly-line robotics, augmented and virtual reality (AR/VR), (drone-based) surveillance, advanced driver assistance systems (ADAS), and autonomous cars. Common requirements are accuracy and speed, while ensuring long operating distance, high tolerance to background illumination and robustness to interference from other LiDAR systems. To meet these demands, the DTOF sensor community has provided numerous architectures, typically making use of resource sharing that often introduces tradeoffs between pixel count and speed. If resource sharing is not used, reduced fill factor, high non-uniformity, and pile-up distortion generally arise, thus limiting

👥 作者与机构

Augusto Ronchini Ximenes1, Preethi Padmanabhan2, Myung-Jae Lee2,