A 22ng/√Hz 17mW MEMS Accelerometer with Digital Noise-Reduction Techniques

📋 论文概要

本文提出了一种全集成MEMS加速度计，通过数字降噪技术实现了22ng/√Hz的超低噪声和17mW的低功耗，适用于下一代油气勘探和基础设施监测等需要大量高灵敏度加速度计的场景。

💡 主要创新点

• 采用数字噪声抑制技术，在不增加功耗的前提下显著降低MEMS加速度计的噪声水平。
• 实现了极低噪声（22ng/√Hz）与低功耗（17mW）的平衡，满足电池供电的高灵敏度应用需求。

🏷 关键词

📄 原文摘要

Keijiro Mori, Naoki Mori, Akira Matsumoto, Hideto Kazama, Yudai Kamada, Atsushi Isobe, Tomonori Sekiguchi Hitachi, Tokyo, Japan In emerging applications such as next-generation oil and gas exploration and infrastructure monitoring, a large number of highly sensitive accelerometers need to be deployed. The fully integrated MEMS accelerometer in this work achieves both the extremely low noise level (22ng/√Hz) required by these applications and sufficiently low power (17mW) enabling battery-based operations while meeting the required input range and bandwidth. Low noise is conventionally achieved either by the use of geophones, which have limited input bandwidth, or by the use of MEMS accelerometers, which dissipate much more power [1]. The highlights of this MEMS accelerometer are its MEMS structure with isolated detection and servo capacitors, noise reduction in the digital domain based on awareness of unfamiliar noise mechanisms and its low-noise high-voltage (HV)

👥 作者与机构

Yuki Furubayashi, Takashi Oshima, Taizo Yamawaki, Keiki Watanabe,