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本文提出了一种基于Wien-bridge滤波器的电阻式温度传感器,面积仅0.12mm²,在-40°C至180°C范围内实现了0.1°C (3σ)的高精度。相比现有技术,面积缩小6倍,工作温度范围扩大76%。
energy efficiency than conventional BJT-based sensors [1], but they typically occupy more area (>0.25mm2) and have lower operating temperatures (≤125°C) [2-4]. This work describes a 0.12mm2 resistor-based sensor that uses a Wienbridge (WB) filter to achieve 0.1°C (3σ) inaccuracy from -40°C to 180°C. Compared to a state-of-the-art WB sensor [4], it occupies 6× less area and achieves comparable relative accuracy over a 76% wider operating range. As shown in Fig. 10.3.1, the heart of the sensor is a Wien Bridge (WB) bandpass filter made from polysilicon resistors (RWB = 64kΩ) and MIM capacitors (CWB = 5pF). Unlike Wheatstone-bridge sensors [2,3], WB sensors only require one type of resistor, resulting in higher accuracy, and facilitating the experimental
˘ Gürleyük, Matheus F. Pimenta, Kofi A. A. Makinwa
Sining Pan, Çagrı Delft University of Technology, Delft, The Netherlands Resistor-based temperature sensors can achieve much higher resolution and