A 210 × 340 × 50µm Integrated CMOS System for

📋 论文概要

本文提出一个尺寸仅为210×340×50µm的集成CMOS系统，用于微型机器人，集成了能量收集、传感、处理、通信和驱动功能。解决了此前亚毫米级无线传感器系统中缺少驱动功能的关键问题。

💡 主要创新点

• 首次在亚毫米尺度内集成能量收集、传感、处理、通信和驱动五大功能，实现完整的微型机器人系统。
• 采用超低功耗CMOS设计，使系统在极小体积下仍能自主工作。

🏷 关键词

📄 原文摘要

Processing, Communication and Actuation Li Xu1, Maya Lassiter2, Xiao Wu1, Yejoong Kim1, Jungho Lee1, Makoto Yasuda3, Masaru Kawaminami4, Marc Miskin2, David Blaauw1, Dennis Sylvester1 University of Michigan, Ann Arbor, MI University of Pennsylvania, Philadelphia, PA 3 United Semiconductor Japan, Kuwana, Japan 4 United Semiconductor Japan, Yokohama, Japan 1 2 Built upon significant research into ultra-low power CMOS designs, complete sub-mm3 wireless sensor systems have been introduced [1-7] that include energy harvesting, sensing, processing, and communication. However, a key missing component in such systems is actuation, which could enable a host of new applications. Recently, a new class of electrochemical actuators that operate at low voltage and low power were developed [8]. The lithographic fabrication of these actuators is CMOS compatible, offering an unprecedented opportunity to create micron-scale, monolithic micro-robots.

👥 作者与机构

Micro-Robots with Energy Harvesting, Sensing,