⚡ 本页包含 AI 生成的分析内容，仅供参考
本文提出了一种CMOS分子电子芯片，用于单分子生物传感。通过CMOS工艺制作50nm宽的纳米电极，并采用氧化物覆盖以减少电解液泄漏电流，解决了单分子检测中电极集成和泄漏问题。
Roswell Biotechnology, San Diego, CA metal are exposed by etching away a sacrificial 23µm×15µm “bond pad” to expose a common staging area for the electrodes of 4 adjacent pixels. The 50nm wide electrodes are patterned, then fabricated using a sputtering and liftoff process. A second sputtering step caps the vias and covers part of the wire with oxide to minimize current leakage into the electrolyte. For conventional photolithography, the wafers are pulled before passivation with individual top metal pads exposed for each electrode. Vias and passivation are subsequently added. The nanoelectrodes are patterned with 193nm immersion lithography, and gap narrowing techniques reduce the gap from ~150nm to ~20nm. The electrodes are passivated with a 100nm oxide to minimize the leakage current. Molecular electronics is the concept of integrating single molecules into circuits as functional elements. For nearly 50 years, this has been envisioned as a way to extend
University of California, San Diego, CA