1024 3D-Stacked Monolithic NEMS Array with 375µm2 0.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing

📋 论文概要

本文提出了一个1024单元的3D堆叠单片NEMS阵列，配合像素级读出电路，实现了375µm²面积和0.5mW低功耗，频率偏差仅0.28ppm。该设计解决了NEMS传感器有效面积与分子聚焦束不匹配的问题，大幅提高了单分子质量检测的效率和分辨率。

💡 主要创新点

• 首次实现1024单元3D堆叠单片NEMS阵列，显著增大传感面积以匹配分子束焦点，提高检测概率。
• 像素级读出电路仅需375µm²面积和0.5mW功耗，并实现0.28ppm的低频率偏差，支持高精度质量检测。
• 单片集成NEMS与CMOS，为zeptogram级质量传感提供紧凑高效的解决方案。

🏷 关键词

📄 原文摘要

Christophe Plantier, Emmanuel Rolland, Marc Gely, Giulia Usai, Claude Tabone, Gaël Pillonnet, Stéphanie Robinet, Sébastien Hentz CEA-Léti, Grenoble, France NanoElectroMechanical System (NEMS)-based resonator sensors are a promising approach to detect a single molecule deposition with zeptogram mass resolution [1]. However, MEMS sensing areas (on the order of 1µm²) are several orders of magnitude lower than the mass deposition focus beam (mm²-scale), dramatically reducing the probability of detecting molecules, thus increasing the detection time [2]. NEMS and CMOS co-integration has already been considered but the density NEMS arrays limits the detection probability and scalable readout circuits fully suitable to NEMS pixel constraints e.g. size, power consumption, resolution has not been proposed yet. We propose the first realization of a fully 3D-monolithic 1024 zepto-balances (zBal) array

👥 作者与机构

Gérard Billiot, Paul Mattei, Bogdan Vysotskyi, Adrien Reynaud, Louis Hutin,