A 3.5×3.5mm2 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack

📋 论文概要

本文提出了一种基于MSS-CMOS异构集成的16通道多模态气体传感器芯片堆叠，尺寸为3.5×3.5mm²，每通道功耗仅1.47mW，解决了传统气体传感器因分立元件导致体积大、功耗高的问题，适用于可穿戴设备、可摄入药丸和智能标签等场景。

💡 主要创新点

• 采用MSS-CMOS异构集成技术，将传感器与CMOS电路垂直堆叠，显著缩小了芯片尺寸并降低了功耗。
• 实现了16通道多模态气体传感，支持多种气体同时检测，提升了传感系统的集成度和功能性。

🏷 关键词

📄 原文摘要

University of Tsukuba, Tsukuba, Japan 4 University of Southern California, Los Angels, CA 1 2 Miniaturizing and reducing the power consumption of multi-modal gas sensors with multiple channels can enable a wide array of applications, including integrating with wearable devices for daily breath analysis, encapsulation into ingestible pills for internal body measurements, and embedding into smart tags for food freshness management (Fig. 20.1.1). Traditional gas sensors typically have the transducer and CMOS chip connected via wiring on a substrate, leading to a large-form factor that requires complicated and expensive packaging and cannot readily scale to many-sensor arrays [1]. Recent studies have proposed gas sensors utilizing a MEMS-CMOS stack; however, these have yet to demonstrate responses

👥 作者与机构

Kotaro Naruse1, Naru Kato1, Takuma Matsumori1, Jun Shiomi1, Yoshihiro Midoh1,

Tetsuya Hirose1, Gaku Imamura1,2, Genki Yoshikawa2,3, Constantine Sideris4, Noriyuki Miura1 Osaka University, Suita, Japan National Institute for Materials Science, Tsukuba, Japan 3