MEMS-Free 4096-Pixel CMOS E-Nose Gas-Sensor Array with Molecular-Selective Metal-Organic-Framework Sensing and In-Pixel Thermodynamic Modulation for Fast Sensor Regeneration

📋 论文概要

本文提出一种无MEMS的4096像素CMOS电子鼻气体传感器阵列，采用金属有机框架（MOF）实现分子选择性传感，并结合像素级信号处理电路。该设计解决了传统电子鼻体积大、功耗高的问题，实现了高分辨率气体检测。

💡 主要创新点

• 采用MOF材料实现分子选择性气体传感，无需MEMS结构，降低系统复杂度。
• 集成4096像素阵列与像素级读出电路，提升气体检测的空间分辨率和灵敏度。
• CMOS工艺兼容的片上集成方案，实现小型化、低功耗电子鼻系统。

🏷 关键词

📄 原文摘要

species and concentrations is critical for a myriad of applications, including environmental protection, industry automation, public health monitoring, and bio-/chemical-security surveillance. For example, gas sensing in large chemical plants is crucial for safety and production efficiency, with ammonia (NH3) being particularly important due to its extensive use [1]. Electronic noses (e-noses) consist of a chemical sensor array with surface recognition modules for capturing specific or multi-species gas molecules followed by electronic signal acquisition and processing [2]. Despite decades of exploration [3-5], the development of e-noses is still in its early stages, and existing e-noses continue to face major challenges as: (1) limited selectivity on target

👥 作者与机构

Marco Saif*, Fuze Jiang*, Shao-Wei Lo, Adam Wang, Zhikai Huang,

Jiachen Wang, Hangxing Liu, Chih-Jen Shih, Thomas Burger, Hua Wang ETH Zürich, Zürich, Switzerland *Equally Credited Authors (ECAs) Accurate and real-time sensing of gas molecule