Fully Integrated Self-Propelling Microrobot in 180nm CMOS with Sub-GHz Parity-Time-Symmetry On-Chip Energy Harvesting and Traveling Wave Electroosmosis Actuation

📋 论文概要

本文提出了一种全集成自推进微机器人，采用180nm CMOS工艺，通过子GHz奇偶时间对称（PT对称）片上能量收集技术实现无线供电。该设计将能量收集、控制电路和驱动机制集成在单个芯片上，解决了微型机器人自主运动的重大挑战。

💡 主要创新点

• 首次在CMOS芯片上实现自推进微机器人的全集成，包括能量收集、控制与驱动。
• 采用子GHz奇偶时间对称（PT对称）片上能量收集，提高了无线功率传输的效率与鲁棒性。
• 利用180nm CMOS工艺实现了低成本、小尺寸的微型机器人系统。

🏷 关键词

📄 原文摘要

developing millimeter-scale and micrometer-scale micro-robots. However, achieving autonomous motion within a CMOS die has remained a significant challenge. This difficulty stems from the need to integrate energy harvesting circuits, control circuits, and crucial actuation mechanisms onto a single die. In recent years, several studies have successfully integrated energy harvesting and control circuits [1-4], with energy harvesting typically accomplished through magnetic coupling coils or photovoltaic cells. Magnetic resonance coupling (MRC) for wireless power transfer (WPT), however, is often highly sensitive to variations in load, while photovoltaic energy harvesting requires specialized processes to fabricate on-chip solar cells. Actuation mechanisms, on the other hand, frequently need to be attached to the chip using

👥 作者与机构

Runqing Cai, Muhanmad Dilawar Khan Niazi, Yucheng Ai, Jin Zhu, Linsheng Wu, Xuyang Lu

Shanghai Jiao Tong University, Shanghai, China Modern integrated circuit technology has provided the essential tools for