A Micromachined Heterogeneously Integrated Active-Probe Enabling Non-Disruptive In-Situ Measurements from DC to 50GHz

📋 论文概要

该论文提出了一种微机械异构集成有源探针，通过将高性能射频感测放大器与微机械探针基板集成，实现了从DC到50GHz的非破坏性原位测量，解决了传统50Ω测试设备在微尺度接口中因寄生效应导致的信号失真问题。

💡 主要创新点

• 首次实现了微机械探针与射频感测放大器的异构集成，显著降低了探针的寄生电容和电感。
• 提出了一种高阻抗、高带宽的探针设计，能够在微米级接口上进行非破坏性测量，避免信号路径失真。

🏷 关键词

📄 原文摘要

integrated microsystems becomes increasingly difficult as these systems scale in size and speed. These interfaces are tight pitch and parasitic sensitive, limiting the use of traditional (50Ω) test equipment. A microscale high-Z and high-speed probe placed close to the test point minimizes capacitive and inductive loading which minimizes signal path distortion. Through heterogeneously integrating a high performance RF sense amp with a micromachined probe substrate, this work creates a probe that is capable of non-disruptive probing in micron-scale interfaces enabling testing of complex HI assemblies and monolithic devices. Compared to prior art in micro-scale probe systems for debuging [1-5], this work presents the first micron scale probe coupled with extremely high bandwidth. Compared to prior

👥 作者与机构

Jesse Moody, Tyler Liebsch, Patrick Finnegan, Stefan Lepkowski,

Robert Costanzo, Mieko Hirabayashi, Matt Jordan, Travis Forbes, Christopher Nordquist Sandia National Laboratories, Albuquerque, NM Failure analysis and debugging of densely