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ISSCC 2026Session 29 · BIOCHEMICAL SENSORS FOR LIFE SCIENCES AND AGRICULTUREMedical & Bio22nm FDSOI CMOS

A 1400THz/s Ultra-Fast-Scan 14GHz EPR-on-a-Chip Based on Injection-Locked Phase Detection Featuring 120µM Concentration Sensitivity

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📋 论文概要

本文提出了一种基于注入锁定相位检测的超快扫描电子顺磁共振(EPR)芯片,工作频率14GHz,扫描速率达1400THz/s,可实现120µM浓度的顺磁物种检测。该芯片采用22nm FDSOI CMOS工艺,通过相干频率生成和信号下变频实现低噪声读出,无需锁相解调,单电感作为顺磁传感器。

💡 主要创新点

核心指标
扫描速率1400THz/s,检测浓度120µM
工艺节点
22nm FDSOI CMOS
重要性
发表年份
ISSCC 2026

🏷 关键词

电子顺磁共振注入锁定相位检测超快扫描CMOS EPR-on-a-chip

📄 原文摘要

span (100Gauss) Ultra-fast scan (1400THz/s) EPR-on-a-Chip based on injection-locked phase detection, implemented in CMOS 22nm-FDSOI technology is presented. 14GHz coherent frequency generation and sensing signal down-conversion is used to implement a stable and low noise EPR readout at around 500MHz without requiring lock-in based demodulation. A single inductor is used as paramagnetic sensor. The detection and direct analysis of paramagnetic species using Electron Paramagnetic Resonance (EPR) spectrometry is becoming a rapidly growing activity. Applications range from chemistry to biomedical and a wide range of materials characterization for energy production, quantum computing, semiconductors, etc. In EPR, two fields are applied to the

👥 作者与机构

Jean-Baptiste David1, Alexandre Siligaris1, Cédric Dehos1, José Luis Gonzalez Jimenez1, Jean-François Jacquot2, Christian Lombard2, Kevin Chighine2,

Vincent Maurel2, Serge Gambarelli2 CEA-LETI-MINATEC, Grenoble, France, 2CEA-IRIG, Grenoble, France 1 Abstract A battery-operated low power (96mW), high sensitivity (120µM), wide

分类:Medical & Bio · 年份:ISSCC 2026